Deformable surface for contact-less control of thin substrates: The flower-bed

HP Vuong (Inventor), RAJ van Ostayen (Inventor), RH Munnig Schmidt (Inventor)

Research output: Patent

Original languageEnglish
Patent number2009764
IPCOCT-12-056
Priority date8/05/14
Publication statusPublished - 2014

Keywords

  • Geen VSNU-classificatie

Cite this