Demonstration of PECVD SiC-SiO2-SiC horizontal slot waveguides

G Pandraud, AB Neira, E Margallo Balbas, CK Yang, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)398-400
Number of pages3
JournalIEEE Photonics Technology Letters
Volume22
Issue number6
Publication statusPublished - 2010

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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