Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist

K Ushakova, QY Berg, SF Pereira, HP Urbach

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalJournal of Optics
Volume17
Issue number12
DOIs
Publication statusPublished - 2015

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