Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist

K Ushakova; QY Berg; SF Pereira; HP Urbach

doi:10.1088/2040-8978/17/12/125615

Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist

K Ushakova, QY Berg, SF Pereira, HP Urbach

ImPhys/Optics

Research output: Contribution to journal › Article › Scientific › peer-review

7 Citations (Scopus)

Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Journal of Optics
Volume	17
Issue number	12
DOIs	https://doi.org/10.1088/2040-8978/17/12/125615
Publication status	Published - 2015

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author = "K Ushakova and QY Berg and SF Pereira and HP Urbach",

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AU - Berg, QY

AU - Pereira, SF

AU - Urbach, HP

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JF - Journal of Optics

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Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist

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