| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 586-590 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
| Volume | 15 |
| Publication status | Published - 1997 |
| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 586-590 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
| Volume | 15 |
| Publication status | Published - 1997 |