DEPOSITION AND PATTERNING OF HIGH-T//c SUPERCONDUCTING THIN FILMS.

B. Dam; M. G.J. Heijman; G. N.A. van Veen; R. P. van Ingen

DEPOSITION AND PATTERNING OF HIGH-T//c SUPERCONDUCTING THIN FILMS.

B. Dam^*, M. G.J. Heijman, G. N.A. van Veen, R. P. van Ingen

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › Scientific › peer-review

1 Citation (Scopus)

Abstract

The discovery of a new class of high-T//c superconducting materials has induced a renewed interest in the possibilites of superconducting thin film devices. As the thin YBa//2Cu//3O//7// minus // delta films appear to have a semi single-crystalline character they are also perfectly suited to study the physics of these materials. Both for materials characterization and the study of the physics of these materials the reproducibility is crucial. The authors demonstrate the possibilities of two structuring methods: reactive ion etching and local amorphisation by energetic (260 keV) ions.

Original language	English
Pages (from-to)	33-40
Number of pages	8
Journal	Le Vide, les couches minces
Volume	43
Issue number	241 suppl
Publication status	Published - Mar 1988
Event	Journ D'Etud 88, Les Films Supraconducteurs a Haute Temp Crit - Paris, Fr Duration: 14 Jun 1988 → 16 Jun 1988

Cite this

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title = "DEPOSITION AND PATTERNING OF HIGH-T//c SUPERCONDUCTING THIN FILMS.",

abstract = "The discovery of a new class of high-T//c superconducting materials has induced a renewed interest in the possibilites of superconducting thin film devices. As the thin YBa//2Cu//3O//7// minus // delta films appear to have a semi single-crystalline character they are also perfectly suited to study the physics of these materials. Both for materials characterization and the study of the physics of these materials the reproducibility is crucial. The authors demonstrate the possibilities of two structuring methods: reactive ion etching and local amorphisation by energetic (260 keV) ions.",

author = "B. Dam and Heijman, {M. G.J.} and {van Veen}, {G. N.A.} and {van Ingen}, {R. P.}",

year = "1988",

month = mar,

language = "English",

volume = "43",

pages = "33--40",

journal = "Le Vide, les couches minces",

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publisher = "Soci{\'e}t{\'e} Fran{\c c}aise du Vide",

number = "241 suppl",

note = "Journ D'Etud 88, Les Films Supraconducteurs a Haute Temp Crit ; Conference date: 14-06-1988 Through 16-06-1988",

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TY - JOUR

T1 - DEPOSITION AND PATTERNING OF HIGH-T//c SUPERCONDUCTING THIN FILMS.

AU - Dam, B.

AU - Heijman, M. G.J.

AU - van Veen, G. N.A.

AU - van Ingen, R. P.

PY - 1988/3

Y1 - 1988/3

N2 - The discovery of a new class of high-T//c superconducting materials has induced a renewed interest in the possibilites of superconducting thin film devices. As the thin YBa//2Cu//3O//7// minus // delta films appear to have a semi single-crystalline character they are also perfectly suited to study the physics of these materials. Both for materials characterization and the study of the physics of these materials the reproducibility is crucial. The authors demonstrate the possibilities of two structuring methods: reactive ion etching and local amorphisation by energetic (260 keV) ions.

AB - The discovery of a new class of high-T//c superconducting materials has induced a renewed interest in the possibilites of superconducting thin film devices. As the thin YBa//2Cu//3O//7// minus // delta films appear to have a semi single-crystalline character they are also perfectly suited to study the physics of these materials. Both for materials characterization and the study of the physics of these materials the reproducibility is crucial. The authors demonstrate the possibilities of two structuring methods: reactive ion etching and local amorphisation by energetic (260 keV) ions.

UR - http://www.scopus.com/inward/record.url?scp=0023979091&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0023979091

SN - 0223-4335

VL - 43

SP - 33

EP - 40

JO - Le Vide, les couches minces

JF - Le Vide, les couches minces

IS - 241 suppl

T2 - Journ D'Etud 88, Les Films Supraconducteurs a Haute Temp Crit

Y2 - 14 June 1988 through 16 June 1988

ER -

DEPOSITION AND PATTERNING OF HIGH-T//c SUPERCONDUCTING THIN FILMS.

Abstract

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