Deposition, milling, and etching with a focused helium ion beam

PFA Alkemade, E van Veldhoven

Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

Original languageEnglish
Title of host publicationNano-fabrication, techniques and principles
EditorsM Stepanova, S Dew
Place of Publications.l.
PublisherSpringer
Pages275-300
Number of pages344
ISBN (Print)978-3-7091-0423-1
Publication statusPublished - 2011

Keywords

  • Vakpubl., Overig wet. > 3 pag

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