Deposition, milling, and etching with a focused helium ion beam

PFA Alkemade, E van Veldhoven

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific

Original language	English
Title of host publication	Nano-fabrication, techniques and principles
Editors	M Stepanova, S Dew
Place of Publication	s.l.
Publisher	Springer
Pages	275-300
Number of pages	344
ISBN (Print)	978-3-7091-0423-1
Publication status	Published - 2011

Keywords

@inbook{ad1662f37d7c40299cce297b450fa017,

title = "Deposition, milling, and etching with a focused helium ion beam",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "PFA Alkemade and Veldhoven, {E van}",

year = "2011",

language = "English",

isbn = "978-3-7091-0423-1",

pages = "275--300",

editor = "M Stepanova and S Dew",

booktitle = "Nano-fabrication, techniques and principles",

publisher = "Springer",

}