Deposition of magnesium hydride thin films using radio frequency reactive sputtering

C Platzer-Bjorkman, TT Mongstad, JP Maehlen, A Baldi, S Karazhanov, A Holt

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)5949-5954
Number of pages6
JournalThin Solid Films
Volume519
Publication statusPublished - 2011

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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