@article{8d818b3e53544dc2b2c5b6e41235b6a9,
title = "Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma",
keywords = "academic journal papers, Geen BTA classificatie",
author = "C Biasotto and AM Daltrini and RC Teixeira and FA Boscoli and JA Diniz and SA Moshkalev and I Doi",
year = "2007",
language = "Undefined/Unknown",
volume = "25",
pages = "1166--1170",
journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "4",
}