Depth profile analysis of Si with low-energy and oblique O2+ beams.

ZX Jiang, PFA Alkemade, JLF Wang

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings 12th Annual SIMS Workshop.
    EditorsR Lareau, G Gillen, S Huls
    Pages6-8
    Number of pages3
    Publication statusPublished - 1999

    Publication series

    Name
    Name
    Volume1

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