Depth resolution for Ge in Si with low energy and grazing O2+ beams

PFA Alkemade, ZX Jiang, R Badheka, JA van den Berg, DG Armour

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Name
Publisher	Wiley

Cite this

@inproceedings{ad6ba375ea414ef8963def3b14f63b98,

title = "Depth resolution for Ge in Si with low energy and grazing O2+ beams",

author = "PFA Alkemade and ZX Jiang and R Badheka and {van den Berg}, JA and DG Armour",

year = "1998",

language = "Undefined/Unknown",

isbn = "0471978264",

publisher = "Wiley",

pages = "275--278",

editor = "G Gillen and R Lareau",

booktitle = "SIMS XI",

}