Depth-selective 2D-ACAR studies on low-k dielectric thin film S Radiation physics and chemistry

SWH Eijt, A van Veen, CV Falub, R Escobar Galindo, H Schut, PE Mijnarends

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	357-362
Number of pages	6
Journal	Radiation Physics and Chemistry
Volume	68
Publication status	Published - 2003

Keywords

@article{84c479145db54b02933aed42bb80019e,

title = "Depth-selective 2D-ACAR studies on low-k dielectric thin film S Radiation physics and chemistry",

keywords = "ZX CWTS JFIS < 1.00",

author = "SWH Eijt and {van Veen}, A and CV Falub and {Escobar Galindo}, R and H Schut and PE Mijnarends",

year = "2003",

language = "Undefined/Unknown",

volume = "68",

pages = "357--362",

journal = "Radiation Physics and Chemistry",

issn = "0969-806X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Depth-selective 2D-ACAR studies on low-k dielectric thin film S Radiation physics and chemistry

AU - Eijt, SWH

AU - van Veen, A

AU - Falub, CV

AU - Escobar Galindo, R

AU - Schut, H

AU - Mijnarends, PE

PY - 2003

Y1 - 2003

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0969-806X

VL - 68

SP - 357

EP - 362

JO - Radiation Physics and Chemistry

JF - Radiation Physics and Chemistry

ER -