Design and construction of a high resolution 3D translation stage for metrological applications

KR Koops, R Banning, PMLO Scholte, WC Heerens, JMTA Adriaens, WL de Koning

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	S857-S860
Journal	Applied Physics A: materials science & processing
Volume	66
Publication status	Published - 1998

Cite this

@article{eb8464e68df9472cbe5465a2e65101e5,

title = "Design and construction of a high resolution 3D translation stage for metrological applications",

author = "KR Koops and R Banning and PMLO Scholte and WC Heerens and JMTA Adriaens and {de Koning}, WL",

year = "1998",

language = "Undefined/Unknown",

volume = "66",

pages = "S857--S860",

journal = "Applied Physics A: materials science & processing",

issn = "0947-8396",

publisher = "Springer",

}

TY - JOUR

T1 - Design and construction of a high resolution 3D translation stage for metrological applications

AU - Koops, KR

AU - Banning, R

AU - Scholte, PMLO

AU - Heerens, WC

AU - Adriaens, JMTA

AU - de Koning, WL

PY - 1998

Y1 - 1998

M3 - Article

SN - 0947-8396

VL - 66

SP - S857-S860

JO - Applied Physics A: materials science & processing

JF - Applied Physics A: materials science & processing

ER -