Design and construction of a high resolution 3D translation stage for metrological applications

KR Koops, R Banning, PMLO Scholte, WC Heerens, JMTA Adriaens, WL de Koning

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Pages (from-to)S857-S860
JournalApplied Physics A: materials science & processing
Volume66
Publication statusPublished - 1998

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Koops, KR., Banning, R., Scholte, PMLO., Heerens, WC., Adriaens, JMTA., & de Koning, WL. (1998). Design and construction of a high resolution 3D translation stage for metrological applications. Applied Physics A: materials science & processing, 66, S857-S860.