Entwurf und Regelung eines Positioniersystems für robotergestützte Nanomesstechnik

Translated title of the contribution: Design and control of a positioning system for robot-based nanometrology

Markus Thier*, Rudolf Saathof, Ernst Csencsics, Reinhard Hainisch, Andreas Sinn, Georg Schitter

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)

Abstract

Mechanical vibrations occuring in a production environment cause a relative motion between the sample and inspection tool that distorts measurements at the nanometer level. To overcome this problem, this paper proposes a metrology platform that maintains a constant relative distance to the sample by means of an H& inf;-feedback controller. Experiments in one degree of freedom show that the metrology platform can reduce vibrations as they occur in a production environment by one order of magnitude. Therefore, it enables in-line surface metrology at the nanometer level.

Translated title of the contributionDesign and control of a positioning system for robot-based nanometrology
Original languageGerman
Pages (from-to)727-738
Number of pages12
JournalAt-Automatisierungstechnik
Volume63
Issue number9
DOIs
Publication statusPublished - 2015

Keywords

  • In-process measurement
  • instrumentation
  • precision measurement
  • precision positioning

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