Entwurf und Regelung eines Positioniersystems für robotergestützte Nanomesstechnik

Translated title of the contribution: Design and control of a positioning system for robot-based nanometrology

Markus Thier*, Rudolf Saathof, Ernst Csencsics, Reinhard Hainisch, Andreas Sinn, Georg Schitter

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

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Engineering