Design and control of over-actuated lightweight 450 mm wafer chuck

DAH Laro, R Boshuisen, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

7 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the 2010 Spring Topical meeting
Editors	s.n.
Place of Publication	Cambridge Mass. USA
Publisher	ASPE
Pages	141-144
Number of pages	4
Publication status	Published - 2010
Event	2010 Spring Topical meeting, Cambridge, Massachusetts, USA - Cambridge Mass. USA Duration: 11 Apr 2010 → 13 Apr 2010

Name
Publisher	ASPE

Name
Volume	48

Conference	2010 Spring Topical meeting, Cambridge, Massachusetts, USA
Period	11/04/10 → 13/04/10

Niet eerder opgevoerd

Keywords

@inproceedings{c862bc6e3caa43509838e2561df2c6e0,

title = "Design and control of over-actuated lightweight 450 mm wafer chuck",

keywords = "Conf.proc. > 3 pag",

author = "DAH Laro and R Boshuisen and {van Eijk}, J",

note = "Niet eerder opgevoerd; 2010 Spring Topical meeting, Cambridge, Massachusetts, USA ; Conference date: 11-04-2010 Through 13-04-2010",

year = "2010",

language = "English",

publisher = "ASPE",

pages = "141--144",

editor = "s.n.",

booktitle = "Proceedings of the 2010 Spring Topical meeting",

}

TY - GEN

T1 - Design and control of over-actuated lightweight 450 mm wafer chuck

AU - Laro, DAH

AU - Boshuisen, R

AU - van Eijk, J

N1 - Niet eerder opgevoerd

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 141

EP - 144

BT - Proceedings of the 2010 Spring Topical meeting

A2 - s.n., null

PB - ASPE

CY - Cambridge Mass. USA

T2 - 2010 Spring Topical meeting, Cambridge, Massachusetts, USA

Y2 - 11 April 2010 through 13 April 2010

ER -