Design and control of over-actuated lightweight 450 mm wafer chuck

DAH Laro, R Boshuisen, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

6 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 2010 Spring Topical meeting
Editors s.n.
Place of PublicationCambridge Mass. USA
PublisherASPE
Pages141-144
Number of pages4
Publication statusPublished - 2010
Event2010 Spring Topical meeting, Cambridge, Massachusetts, USA - Cambridge Mass. USA
Duration: 11 Apr 201013 Apr 2010

Publication series

Name
PublisherASPE
Name
Volume48

Conference

Conference2010 Spring Topical meeting, Cambridge, Massachusetts, USA
Period11/04/1013/04/10

Keywords

  • Conf.proc. > 3 pag

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