@inproceedings{c862bc6e3caa43509838e2561df2c6e0,
title = "Design and control of over-actuated lightweight 450 mm wafer chuck",
keywords = "Conf.proc. > 3 pag",
author = "DAH Laro and R Boshuisen and {van Eijk}, J",
note = "Niet eerder opgevoerd; 2010 Spring Topical meeting, Cambridge, Massachusetts, USA ; Conference date: 11-04-2010 Through 13-04-2010",
year = "2010",
language = "English",
publisher = "ASPE",
pages = "141--144",
editor = "s.n.",
booktitle = "Proceedings of the 2010 Spring Topical meeting",
}