The increasing demand for small, robust and low-cost gas sensors triggers the batch fabrication of highly selective and sensitive miniaturized devices. A linear variable optical filter (LVOF) based microspectrometer enables selectivity in a wide wavelength range, while maintaining the robustness and low cost. To achieve sensitivity in an LVOF based absorption spectrometer, a long gas cell is required. In this paper, we propose an on-chip absorption path that also serves as a gas cell, where the light beam is steered using 45° inclined mirrors. The fabrication of 45° inclined mirrors is demonstrated and optical efficiency of the system is analyzed using ray tracing.
|Number of pages||6|
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 2016|
|Event||MME 2016: 27th Micromechanics and Microsystems Europe Workshop - Cork, Ireland|
Duration: 28 Aug 2016 → 30 Aug 2016