Design and fabrication of 45° inclined mirrors for wafer-level optical absorption spectroscopy

N.P. Ayerden, M. Ghaderi, R.F. Wolffenbuttel

Research output: Contribution to journalConference articleScientificpeer-review

1 Citation (Scopus)
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Abstract

The increasing demand for small, robust and low-cost gas sensors triggers the batch fabrication of highly selective and sensitive miniaturized devices. A linear variable optical filter (LVOF) based microspectrometer enables selectivity in a wide wavelength range, while maintaining the robustness and low cost. To achieve sensitivity in an LVOF based absorption spectrometer, a long gas cell is required. In this paper, we propose an on-chip absorption path that also serves as a gas cell, where the light beam is steered using 45° inclined mirrors. The fabrication of 45° inclined mirrors is demonstrated and optical efficiency of the system is analyzed using ray tracing.
Original languageEnglish
Article number012018
Pages (from-to)1-6
Number of pages6
JournalJournal of Physics: Conference Series
Volume757
Issue number1
DOIs
Publication statusPublished - 2016
EventMME 2016: 27th Micromechanics and Microsystems Europe Workshop - Cork, Ireland
Duration: 28 Aug 201630 Aug 2016
http://mme2016.manucodiata.org/

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