Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beams

DS Jun, VG Kutchoukov, CTH Heerkens, P Kruit

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)134-137
Number of pages4
JournalMicroelectronic Engineering
Volume97
Publication statusPublished - 2012

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