Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beams

DS Jun, VG Kutchoukov, CTH Heerkens, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	134-137
Number of pages	4
Journal	Microelectronic Engineering
Volume	97
Publication status	Published - 2012

Cite this

@article{36f69d719d5245c0b22be207e6e79549,

title = "Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beams",

author = "DS Jun and VG Kutchoukov and CTH Heerkens and P Kruit",

year = "2012",

language = "Undefined/Unknown",

volume = "97",

pages = "134--137",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}