Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer

HW Wu, A Emadi, W van der Vlist, S Grabarnik, G de Graaf, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the 4th Asia pacific conference on transducers and micro/nano technologies (APCOT, 2008)
Editors s.n.
Place of Publications.l.
Publisherapcot
Pages213-216
Number of pages4
ISBN (Print)9784915957383
Publication statusPublished - 2008
Event4th Asia Pacific Conference on Transducers and Micro/Nano Technologies. Tainan, Taiwan - s.l.
Duration: 22 Jun 200825 Jun 2008

Publication series

Name
PublisherAPCOT

Conference

Conference4th Asia Pacific Conference on Transducers and Micro/Nano Technologies. Tainan, Taiwan
Period22/06/0825/06/08

Keywords

  • conference contrib. non-refer.
  • Conf.proc. > 3 pag

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