Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices

DDL Wijngaards, SH Kong, M Bartek, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

49 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)316-323
Number of pages8
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume85
Issue number1-3
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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