@article{a16a7fe4d5ce4c41b8902a604f2fb800,
title = "Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "DDL Wijngaards and SH Kong and M Bartek and RF Wolffenbuttel",
year = "2000",
language = "Undefined/Unknown",
volume = "85",
pages = "316--323",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
number = "1-3",
}