Design and input-shaping control of a novel scanner for high-speed atomic force microscopy

G Schitter, P.J Thurner, P.K Hansma

Research output: Contribution to journalArticleScientificpeer-review

166 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)282-288
Number of pages7
JournalMechatronics
Volume18
Issue number5-6
Publication statusPublished - 2008

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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