Design and modeling of a High-Speed AFM-scanner

G Schitter, K.J Astrom, B.E DeMartini, P.J Thurner, K.L Turner, P.K Hansma

Research output: Contribution to journal › Article › Scientific › peer-review

381 Citations (SciVal)

Original language	Undefined/Unknown
Pages (from-to)	906-915
Number of pages	10
Journal	IEEE Transactions on Control Systems Technology
Volume	15
Issue number	5
Publication status	Published - 2007

Keywords

@article{fc5ecb226471400d8bc49f6b0e6bcd72,

title = "Design and modeling of a High-Speed AFM-scanner",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "G Schitter and K.J Astrom and B.E DeMartini and P.J Thurner and K.L Turner and P.K Hansma",

year = "2007",

language = "Undefined/Unknown",

volume = "15",

pages = "906--915",

journal = "IEEE Transactions on Control Systems Technology",

issn = "1063-6536",

publisher = "IEEE",

number = "5",

}

TY - JOUR

T1 - Design and modeling of a High-Speed AFM-scanner

AU - Schitter, G

AU - Astrom, K.J

AU - DeMartini, B.E

AU - Thurner, P.J

AU - Turner, K.L

AU - Hansma, P.K

PY - 2007

Y1 - 2007

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1063-6536

VL - 15

SP - 906

EP - 915

JO - IEEE Transactions on Control Systems Technology

JF - IEEE Transactions on Control Systems Technology

IS - 5

ER -