Design and modelling of a decoupled, tunable SOI-MEMS gyroscope

I Sabageh, V Rajaraman, E Cretu, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings 13th Workshop on Semiconductors Advances for Future Electronics
EditorsPJ French et al
Place of PublicationUtrecht, The Netherlands
PublisherSTW
Pages143-147
Number of pages5
Publication statusPublished - 2010
EventSAFE 2010, Veldhoven, The Netherlands - Utrecht, The Netherlands
Duration: 18 Nov 201019 Nov 2010

Publication series

Name
PublisherSTW

Conference

ConferenceSAFE 2010, Veldhoven, The Netherlands
Period18/11/1019/11/10

Keywords

  • Conf.proc. > 3 pag

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