Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture

I Sabageh, V Rajaraman, E Cretu

Research output: Contribution to conference › Poster › Professional

Original language	English
Publication status	Published - 2010
Event	Symposium on Microsystems and Innovation 2010, Delft University of Technology - Delft, the Netherlands Duration: 27 Apr 2010 → 27 Apr 2010

Other	Symposium on Microsystems and Innovation 2010, Delft University of Technology
Period	27/04/10 → 27/04/10

Cite this

@conference{a606f764c372496d8903d64864f688cb,

title = "Design and modelling of a three mass, decoupled, tunable SOI MEMS gyroscope with sense frame architecture",

author = "I Sabageh and V Rajaraman and E Cretu",

year = "2010",

language = "English",

note = "Symposium on Microsystems and Innovation 2010, Delft University of Technology ; Conference date: 27-04-2010 Through 27-04-2010",

}