Design and preliminary fabrication of a new micromachined silicon strain sensor based on the campaniform sensillum of insects

DHB Wickasono, G Pandraud, G Craciun, JFL Goosen, WA van Duyl, JFV Vincent, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationConference proceedings of the Asia-Pacific conference of transducers and micro-nano technology
Place of PublicationTokyo, Japan
PublisherThe Institute of Electrical Engineers of Japan
Pages437-442
Number of pages6
ISBN (Print)4-88686-000-1
Publication statusPublished - 2004
EventInternational conference on Electrical engineering 2004, Sapporo, Japan - Tokyo, Japan
Duration: 4 Jul 20048 Jul 2004

Publication series

Name
PublisherThe Institute of Electrical Engineers of Japan
Name
Volume3-1

Conference

ConferenceInternational conference on Electrical engineering 2004, Sapporo, Japan
Period4/07/048/07/04

Keywords

  • Conf.proc. > 3 pag

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