Design and scale-up of chemical vapour deposition reactors for semiconductor processing

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)2119-2128
    Number of pages10
    JournalChemical Engineering Science
    Volume51
    Issue number10
    Publication statusPublished - 1996

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