| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 2119-2128 |
| Number of pages | 10 |
| Journal | Chemical Engineering Science |
| Volume | 51 |
| Issue number | 10 |
| Publication status | Published - 1996 |
Design and scale-up of chemical vapour deposition reactors for semiconductor processing
CR Kleijn, KJ Kuijlaars, HEA van den Akker
Research output: Contribution to journal › Article › Scientific › peer-review
12
Citations
(Scopus)