Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography

MJ Maciel; MF Silva; AC Peixoto; GC Costa; RF Wolffenbuttel; JH Correia

Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography

MJ Maciel, MF Silva, AC Peixoto, GC Costa, RF Wolffenbuttel, JH Correia

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques
Editors	RJ Wiegerink, D Tsoukalas, U Staufer
Place of Publication	Amsterdam
Publisher	Elsevier
Pages	1-4
Number of pages	4
Publication status	Published - 2016
Event	MNE 2015, The Hague, The Netherlands - Amsterdam Duration: 21 Sept 2015 → 24 Sept 2015

Publication series

Name
Publisher	Elsevier

Conference

Conference	MNE 2015, The Hague, The Netherlands
Period	21/09/15 → 24/09/15

Cite this

Maciel, MJ., Silva, MF., Peixoto, AC., Costa, GC., Wolffenbuttel, RF., & Correia, JH. (2016). Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography. In RJ. Wiegerink, D. Tsoukalas, & U. Staufer (Eds.), Proceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques (pp. 1-4). Elsevier.

Maciel, MJ ; Silva, MF ; Peixoto, AC et al. / Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography. Proceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques. editor / RJ Wiegerink ; D Tsoukalas ; U Staufer. Amsterdam : Elsevier, 2016. pp. 1-4

@inproceedings{304ec6b9b5b345e29dc8372780cd876b,

title = "Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography",

author = "MJ Maciel and MF Silva and AC Peixoto and GC Costa and RF Wolffenbuttel and JH Correia",

year = "2016",

language = "English",

publisher = "Elsevier",

pages = "1--4",

editor = "RJ Wiegerink and D Tsoukalas and U Staufer",

booktitle = "Proceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques",

note = "MNE 2015, The Hague, The Netherlands ; Conference date: 21-09-2015 Through 24-09-2015",

}

Maciel, MJ, Silva, MF, Peixoto, AC, Costa, GC, Wolffenbuttel, RF & Correia, JH 2016, Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography. in RJ Wiegerink, D Tsoukalas & U Staufer (eds), Proceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques. Elsevier, Amsterdam, pp. 1-4, MNE 2015, The Hague, The Netherlands, 21/09/15.

Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography. / Maciel, MJ; Silva, MF; Peixoto, AC et al.
Proceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques. ed. / RJ Wiegerink; D Tsoukalas; U Staufer. Amsterdam: Elsevier, 2016. p. 1-4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography

AU - Maciel, MJ

AU - Silva, MF

AU - Peixoto, AC

AU - Costa, GC

AU - Wolffenbuttel, RF

AU - Correia, JH

PY - 2016

Y1 - 2016

M3 - Conference contribution

SP - 1

EP - 4

BT - Proceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques

A2 - Wiegerink, RJ

A2 - Tsoukalas, D

A2 - Staufer, U

PB - Elsevier

CY - Amsterdam

T2 - MNE 2015, The Hague, The Netherlands

Y2 - 21 September 2015 through 24 September 2015

ER -

Maciel MJ, Silva MF, Peixoto AC, Costa GC, Wolffenbuttel RF, Correia JH. Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography. In Wiegerink RJ, Tsoukalas D, Staufer U, editors, Proceedings of the 41st international conference on micro- and nanofabrication and manufacturing using lithography and related techniques. Amsterdam: Elsevier. 2016. p. 1-4