Design Approach for a Multi Beam Electron Beam Induced Deposition System

B van Someren, MJ van Bruggen, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	107-108
Number of pages	2
Journal	Scanning: the journal of scanning microscopies
Volume	27
Issue number	2
Publication status	Published - 2005

Keywords

@article{cef801c236644e6eb97eda1dc93fc253,

title = "Design Approach for a Multi Beam Electron Beam Induced Deposition System",

keywords = "ZX CWTS JFIS < 1.00",

author = "{van Someren}, B and {van Bruggen}, MJ and P Kruit",

year = "2005",

language = "Undefined/Unknown",

volume = "27",

pages = "107--108",

journal = "Scanning: the journal of scanning microscopies",

issn = "0161-0457",

publisher = "John Wiley & Sons",

number = "2",

}