Design considerations for long-range magnetic levitation using reluctance actuators

R Deng, JW Spronck

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)

Abstract

Magnetic levitation is increasingly used in high precision mechatronic motion systems like positioning stages for semiconductor exposure systems. In most magnetic levitation systems the working range in the levitation direction is limited to about 1 mm, and it is desired to increase this range. However, without special means increasing this working range also increases the power consumption, which is undesirable for precision applications mainly due to Joule's Law (P=I²R) heat dissipation. In order to increase the working range of a magnetic levitation system without sacrificing the static and dynamic load capacity, three different coplanar actuator configurations are discussed that enable long-range magnetic levitation.
Original languageEnglish
Title of host publicationProceedings of the 12th international conference of the european society for precision engineering and nanotechnology (euspen), June 4th-7th 2012, Stockholm, Sweden
EditorsP Shore, H Spaan, T Burke
Place of PublicationStockholm, Sweden
PublisherEUSPEN
Pages466-469
Number of pages4
ISBN (Print)978-0-9566790-0-0
Publication statusPublished - 2012
Event12th international conference of the european society for precision engineering and nanotechnology (euspen), Stockholm, Sweden - Stockholm, Sweden
Duration: 4 Jun 20127 Jun 2012

Publication series

Name
PublisherEuspen
Name
Volume1

Conference

Conference12th international conference of the european society for precision engineering and nanotechnology (euspen), Stockholm, Sweden
Period4/06/127/06/12

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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  • Cite this

    Deng, R., & Spronck, JW. (2012). Design considerations for long-range magnetic levitation using reluctance actuators. In P. Shore, H. Spaan, & T. Burke (Eds.), Proceedings of the 12th international conference of the european society for precision engineering and nanotechnology (euspen), June 4th-7th 2012, Stockholm, Sweden (pp. 466-469). EUSPEN.