Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring

J Wei; C Yue; M van der Velden; T Chen; ZW Liu; KAA Makinwa; PM Sarro

doi:10.1016/j.sna.2010.03.021

Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring

J Wei, C Yue, M van der Velden, T Chen, ZW Liu, KAA Makinwa, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	406-417
Number of pages	12
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	162
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2010.03.021
Publication status	Published - 2010

Keywords

CWTS 0.75 <= JFIS < 2.00

Access to Document

10.1016/j.sna.2010.03.021

Cite this

Wei, J., Yue, C., van der Velden, M., Chen, T., Liu, ZW., Makinwa, KAA., & Sarro, PM. (2010). Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring. Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, 162(2), 406-417. https://doi.org/10.1016/j.sna.2010.03.021

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author = "J Wei and C Yue and {van der Velden}, M and T Chen and ZW Liu and KAA Makinwa and PM Sarro",

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Wei, J, Yue, C, van der Velden, M, Chen, T, Liu, ZW, Makinwa, KAA & Sarro, PM 2010, 'Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring', Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, vol. 162, no. 2, pp. 406-417. https://doi.org/10.1016/j.sna.2010.03.021

Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring. / Wei, J; Yue, C; van der Velden, M et al.
In: Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, Vol. 162, No. 2, 2010, p. 406-417.

Research output: Contribution to journal › Article › Scientific › peer-review

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AU - Wei, J

AU - Yue, C

AU - van der Velden, M

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AU - Liu, ZW

AU - Makinwa, KAA

AU - Sarro, PM

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