Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring

J Wei, C Yue, M van der Velden, T Chen, ZW Liu, KAA Makinwa, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

28 Citations (Scopus)
Original languageEnglish
Pages (from-to)406-417
Number of pages12
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume162
Issue number2
DOIs
Publication statusPublished - 2010

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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