Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring

J Wei; C Yue; M van der Velden; T Chen; ZW Liu; KAA Makinwa; PM Sarro

doi:10.1016/j.sna.2010.03.021

Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring

J Wei, C Yue, M van der Velden, T Chen, ZW Liu, KAA Makinwa, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	406-417
Number of pages	12
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	162
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2010.03.021
Publication status	Published - 2010

Keywords

CWTS 0.75 <= JFIS < 2.00

Access to Document

10.1016/j.sna.2010.03.021

Cite this

Wei, J., Yue, C., van der Velden, M., Chen, T., Liu, ZW., Makinwa, KAA., & Sarro, PM. (2010). Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring. Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, 162(2), 406-417. https://doi.org/10.1016/j.sna.2010.03.021

Wei, J ; Yue, C ; van der Velden, M ; Chen, T ; Liu, ZW ; Makinwa, KAA ; Sarro, PM. / Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring. In: Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers. 2010 ; Vol. 162, No. 2. pp. 406-417.

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Wei, J, Yue, C, van der Velden, M, Chen, T, Liu, ZW, Makinwa, KAA & Sarro, PM 2010, 'Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring', Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, vol. 162, no. 2, pp. 406-417. https://doi.org/10.1016/j.sna.2010.03.021

Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring. / Wei, J; Yue, C; van der Velden, M; Chen, T; Liu, ZW; Makinwa, KAA ; Sarro, PM.

In: Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, Vol. 162, No. 2, 2010, p. 406-417.

Research output: Contribution to journal › Article › Scientific › peer-review

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AU - Makinwa, KAA

AU - Sarro, PM

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SN - 0924-4247

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Wei J, Yue C, van der Velden M, Chen T, Liu ZW, Makinwa KAA et al. Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring. Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers. 2010;162(2):406-417. https://doi.org/10.1016/j.sna.2010.03.021