Design figuring and measurement of a correction plate for a wafer stepper.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Optics for the Next Millenium.
Publisher	SPIE
Pages	326-327
Number of pages	2
Publication status	Published - 1999

Name
Publisher	SPIE

Name
Volume	3749

Cite this

@inproceedings{b8db4a3601114f11a6e74a17db5e0478,

title = "Design figuring and measurement of a correction plate for a wafer stepper.",

author = "DA Faas and \{van der Laan\}, CJ and JJM Braat and T Wijchers",

year = "1999",

language = "Undefined/Unknown",

publisher = "SPIE",

pages = "326--327",

booktitle = "Optics for the Next Millenium.",

address = "United States",

}