Design for Reliability of Wafer Level MEMS packaging

JJM Zaal

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Zhang, G.Q., Promotor van Driel, W.D., Copromotor Lee, SWR, Copromotor, External person Schmitz, J, Copromotor, External person Corigliano, A, Copromotor, External person Ferreira, Bram, Copromotor Ernst, Leo, Copromotor
Award date	29 Oct 2012
Place of Publication	Enschede
Publisher	Ipskamp
Print ISBNs	9789491104114
Publication status	Published - 2012

Keywords

@phdthesis{a1802713e5324104855e0a8a71d58e44,

title = "Design for Reliability of Wafer Level MEMS packaging",

keywords = "authored books, Diss. prom. aan TU Delft",

author = "JJM Zaal",

year = "2012",

language = "English",

isbn = "9789491104114",

publisher = "Ipskamp",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}