Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology

V Rajaraman; I Sabageh; PJ French; G Pandraud; E Cretu

doi:10.1016/J.proeng.2011.12.161

Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology

V Rajaraman, I Sabageh, PJ French, G Pandraud, E Cretu

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	Proceedings Eurosensors XXV, September 4-7, 2011, Athens, Greece
Editors	C Tsamis, G Kaltas
Place of Publication	Athens, Greece
Publisher	Elsevier
Pages	647-650
Number of pages	4
DOIs	https://doi.org/10.1016/J.proeng.2011.12.161
Publication status	Published - 2011
Event	Eurosensors XXV - Athens, Greece Duration: 4 Sept 2011 → 7 Sept 2011

Publication series

Name
Publisher	Elsevier

Name	Procedia Engineering
Volume	25
ISSN (Print)	1877-7058

Conference

Conference	Eurosensors XXV
Period	4/09/11 → 7/09/11

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Access to Document

10.1016/J.proeng.2011.12.161

Cite this

Rajaraman, V., Sabageh, I., French, PJ., Pandraud, G., & Cretu, E. (2011). Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology. In C. Tsamis, & G. Kaltas (Eds.), Proceedings Eurosensors XXV, September 4-7, 2011, Athens, Greece (pp. 647-650). (Procedia Engineering; Vol. 25). Elsevier. https://doi.org/10.1016/J.proeng.2011.12.161

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title = "Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology",

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author = "V Rajaraman and I Sabageh and PJ French and G Pandraud and E Cretu",

year = "2011",

doi = "10.1016/J.proeng.2011.12.161",

language = "English",

publisher = "Elsevier",

pages = "647--650",

editor = "C Tsamis and G Kaltas",

booktitle = "Proceedings Eurosensors XXV, September 4-7, 2011, Athens, Greece",

note = "Eurosensors XXV ; Conference date: 04-09-2011 Through 07-09-2011",

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Rajaraman, V, Sabageh, I, French, PJ, Pandraud, G & Cretu, E 2011, Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology. in C Tsamis & G Kaltas (eds), Proceedings Eurosensors XXV, September 4-7, 2011, Athens, Greece. Procedia Engineering, vol. 25, Elsevier, Athens, Greece, pp. 647-650, Eurosensors XXV, 4/09/11. https://doi.org/10.1016/J.proeng.2011.12.161

Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology. / Rajaraman, V; Sabageh, I; French, PJ et al.
Proceedings Eurosensors XXV, September 4-7, 2011, Athens, Greece. ed. / C Tsamis; G Kaltas. Athens, Greece: Elsevier, 2011. p. 647-650 (Procedia Engineering; Vol. 25).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Design, modelling and fabrication of a 40-330 Hz dual-mass MEMS gyroscope on thick-SOI technology

AU - Rajaraman, V

AU - Sabageh, I

AU - French, PJ

AU - Pandraud, G

AU - Cretu, E

PY - 2011

Y1 - 2011

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

U2 - 10.1016/J.proeng.2011.12.161

DO - 10.1016/J.proeng.2011.12.161

M3 - Conference contribution

SP - 647

EP - 650

BT - Proceedings Eurosensors XXV, September 4-7, 2011, Athens, Greece

A2 - Tsamis, C

A2 - Kaltas, G

PB - Elsevier

CY - Athens, Greece

T2 - Eurosensors XXV

Y2 - 4 September 2011 through 7 September 2011

ER -