Design of a 4 degrees of freedom decoupled monolithic compliant alignment mechanism for additive manufacturing

Niek Van Hoek, Volkert Van Der Wijk, Just Herder, Gerrit Oosterhuis

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)

Abstract

Optical systems require kinematic mounts to align the optical components relative to a light path during installation. Depending on the application and the exact type of optical component, these mechanisms may require up to six degrees of freedom (DOFs). An industry where such optical systems are important is the semiconductor industry where high precision alignment is required for production and inspection. Hysteresis, crosstalk and resonance vibrations result in reduced precision of existing devices. In this research a monolithic decoupled adjustable optical mount manufactured using additive manufacturing is proposed as a solution. A prototype was manufactured in grade 5 titanium using Laser Beam Melting. This prototype has 4 DOFs which can be adjusted in planar translational motion with a range of 1 mm and in rotational out of plane motion with a range of 1 mrad and a resolution of 10 μm and 10 μrad. Experiments show a first eigenfrequency of 610 Hz.

Original languageEnglish
Title of host publicationProceedings 18th International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2018)
EditorsO. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips
Place of PublicationCranfield, UK
PublisherEUSPEN
Pages297-298
ISBN (Print)978-0-99577512-1
Publication statusPublished - 2018
Event18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 - Venice, Italy
Duration: 4 Jun 20188 Jun 2018

Conference

Conference18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018
CountryItaly
CityVenice
Period4/06/188/06/18

Keywords

  • Additive manufacturing
  • Compliant mechanism
  • Kinematic mount
  • Optical alignment

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