Design of a magnetically levitated nm-resolution linear slider

DAH Laro, T Porck, JW Spronck, J van Eijk, AV Lebedev

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the 6th euspen International conference
Editors E. Brinksmeier
Place of PublicationEuspen
PublisherSPEN
Pages1-4
Number of pages4
ISBN (Print)0-9553082-0-8
Publication statusPublished - 2006
EventProceedings of the 6th euspen International conference - Euspen
Duration: 1 May 20063 May 2006

Publication series

Name
PublisherSPEN
Name
Volume1

Conference

ConferenceProceedings of the 6th euspen International conference
Period1/05/063/05/06

Keywords

  • Conf.proc. > 3 pag

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