Design of a next generation 6 DoF stage for scanning applications in vacuum with nanometer accuracy and mGauss magnetic stray field

A de Klerk, GZ Angelis, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the 19th annual ASPE meeting
EditorsAJ Hazetten
Place of PublicationRaleigh
PublisherASPE
Pages1-6
Number of pages6
ISBN (Print)1-887706-36-4
Publication statusPublished - 2004
EventConference, Florida - Raleigh
Duration: 24 Oct 200429 Oct 2004

Publication series

Name
PublisherASPE

Conference

ConferenceConference, Florida
Period24/10/0429/10/04

Keywords

  • Conf.proc. > 3 pag

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