@inproceedings{53e70988c974447e99ba75d94779385f,
title = "Design of a next generation 6 DoF stage for scanning applications in vacuum with nanometer accuracy and mGauss magnetic stray field",
keywords = "Conf.proc. > 3 pag",
author = "{de Klerk}, A and GZ Angelis and {van Eijk}, J",
year = "2004",
language = "Undefined/Unknown",
isbn = "1-887706-36-4",
publisher = "ASPE",
pages = "1--6",
editor = "AJ Hazetten",
booktitle = "Proceedings of the 19th annual ASPE meeting",
note = "Conference, Florida ; Conference date: 24-10-2004 Through 29-10-2004",
}