Design of a novel electrostatic switch with low operating voltage and high speed

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	MME 2003 14th Micromechanics Europe workshop
Editors	s.n.
Place of Publication	s.l.
Publisher	s.n.
Pages	33-36
Number of pages	4
ISBN (Print)	90-808266-1-8
Publication status	Published - 2003
Event	14th Micromechanics Europe workshop, Delft, The Netherlands - s.l. Duration: 2 Nov 2003 → 4 Nov 2003

Name
Publisher	s.n.

Conference	14th Micromechanics Europe workshop, Delft, The Netherlands
Period	2/11/03 → 4/11/03

Keywords

@inproceedings{8925e45385744b23b01163b8d1a31675,

title = "Design of a novel electrostatic switch with low operating voltage and high speed",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "H Yang and L Pakula and PJ French",

year = "2003",

language = "Undefined/Unknown",

isbn = "90-808266-1-8",

publisher = "s.n.",

pages = "33--36",

editor = "s.n.",

booktitle = "MME 2003 14th Micromechanics Europe workshop",

note = "null ; Conference date: 02-11-2003 Through 04-11-2003",

}

TY - GEN

T1 - Design of a novel electrostatic switch with low operating voltage and high speed

AU - Yang, H

AU - Pakula, L

AU - French, PJ

PY - 2003

Y1 - 2003

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-808266-1-8

SP - 33

EP - 36

BT - MME 2003 14th Micromechanics Europe workshop

A2 - s.n., null

PB - s.n.

CY - s.l.

Y2 - 2 November 2003 through 4 November 2003

ER -