@inproceedings{8925e45385744b23b01163b8d1a31675,
title = "Design of a novel electrostatic switch with low operating voltage and high speed",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "H Yang and L Pakula and PJ French",
year = "2003",
language = "Undefined/Unknown",
isbn = "90-808266-1-8",
publisher = "s.n.",
pages = "33--36",
editor = "s.n.",
booktitle = "MME 2003 14th Micromechanics Europe workshop",
note = "14th Micromechanics Europe workshop, Delft, The Netherlands ; Conference date: 02-11-2003 Through 04-11-2003",
}