Design of an aberration corrected low-voltage SEM

RH van Aken, D.J. Maas, CW Hagen, JE Barth, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1411-1419
    Number of pages9
    JournalUltramicroscopy
    Volume110
    Issue number11
    Publication statusPublished - 2010

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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