Design of an Electron Projection System with Slider Lenses and Multiple Beams

D Moonen, LHA Leunissen, PWH de Jager, P Kruit, AJ Bleeker, KD van der Mast

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Name
Publisher	SPIE

Name
Volume	4688

Emerging Lithographic Technologies VI

Keywords

@inproceedings{3c53190837e541a4aa470efa8b1b5797,

title = "Design of an Electron Projection System with Slider Lenses and Multiple Beams",

keywords = "Conf.proc. > 3 pag",

author = "D Moonen and LHA Leunissen and {de Jager}, PWH and P Kruit and AJ Bleeker and {van der Mast}, KD",

note = "Emerging Lithographic Technologies VI",

year = "2002",

language = "Undefined/Unknown",

isbn = "0-8194-4434-0",

publisher = "SPIE",

pages = "932--943",

booktitle = "Proceedings SPIE",

address = "United States",

}

TY - GEN

T1 - Design of an Electron Projection System with Slider Lenses and Multiple Beams

AU - Moonen, D

AU - Leunissen, LHA

AU - de Jager, PWH

AU - Kruit, P

AU - Bleeker, AJ

AU - van der Mast, KD

N1 - Emerging Lithographic Technologies VI

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-8194-4434-0

SP - 932

EP - 943

BT - Proceedings SPIE

PB - SPIE

ER -