@inproceedings{f91cc3d486e94e9ca5bf924362c85d4d,
title = "Design of in-package MST-based actuators for micro-assembly",
keywords = "Elektrotechniek, Techniek, Vakpubl., Overig wet. > 3 pag",
author = "VA Henneken and {van den Bedem}, S and M Tichem and B Karpuschewski and PM Sarro",
note = "ed. is niet bekend; Semiconductor advances for future electronics, Veldhoven, The Netherlands ; Conference date: 25-11-2004 Through 26-11-2004",
year = "2004",
language = "Undefined/Unknown",
isbn = "90-73461-43X",
publisher = "STW Technology Foundation",
pages = "747--752",
editor = "S.n.",
booktitle = "SAFE 2004; Semiconductor advances for future electronics",
}