Engineering
Large Area
100%
Lithography
100%
Metasurface
100%
Fabrication
100%
Design
100%
Roughness
33%
Microelectromechanical System
33%
Fits and Tolerances
33%
Thickness
16%
Plasmonics
16%
Measurement
16%
Throughput
16%
Design Phase
16%
Limited Number
16%
Layer Thickness
16%
Measures
16%
Wavelength
16%
Chip Area
16%
Surface
16%
Dielectrics
16%
Detrimental Effect
16%
Large Surface
16%
INIS
design
100%
fabrication
100%
layers
60%
surfaces
40%
roughness
40%
tolerance
40%
foundries
40%
thickness
40%
metals
40%
aluminium
40%
dielectric materials
20%
wavelengths
20%
units
20%
absorption
20%
comparative evaluations
20%
shape
20%
peaks
20%
metamaterials
20%
length
20%
electron beams
20%
Material Science
Lithography
100%
Microelectromechanical System
33%
Surface Roughness
33%
Metal
33%
Aluminum
33%
Materials
16%
Metamaterial
16%
Dielectric Material
16%
Keyphrases
Large-area Metasurfaces
100%
Thickness Tolerance
33%
IR Absorber
16%
Plasmonic Response
16%