Engineering
Chip Area
16%
Design
100%
Design Phase
16%
Detrimental Effect
16%
Dielectrics
16%
Fabrication
100%
Fits and Tolerances
33%
Large Area
100%
Large Surface
16%
Layer Thickness
16%
Limited Number
16%
Lithography
100%
Measurement
16%
Measures
16%
Metasurface
100%
Microelectromechanical System
33%
Plasmonics
16%
Roughness
33%
Surface
16%
Thickness
16%
Throughput
16%
Wavelength
16%
INIS
absorption
20%
aluminium
40%
comparative evaluations
20%
design
100%
dielectric materials
20%
electron beams
20%
fabrication
100%
foundries
40%
layers
60%
length
20%
metals
40%
metamaterials
20%
peaks
20%
roughness
40%
shape
20%
surfaces
40%
thickness
40%
tolerance
40%
units
20%
wavelengths
20%
Material Science
Aluminum
33%
Dielectric Material
16%
Lithography
100%
Materials
16%
Metal
33%
Metamaterial
16%
Microelectromechanical System
33%
Surface Roughness
33%
Keyphrases
IR Absorber
16%
Large-area Metasurfaces
100%
Plasmonic Response
16%
Thickness Tolerance
33%