Design of lithographic objectives including the effect of spatially induced birefringence

A Serebriakov, E. Maksimov, F Bociort, JJM Braat

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	624-635
Number of pages	12
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	5249
Publication status	Published - 2003

Keywords

@article{0cc447d305cd4332a6cb30d42a3655c7,

title = "Design of lithographic objectives including the effect of spatially induced birefringence",

keywords = "Peer-lijst tijdschrift",

author = "A Serebriakov and E. Maksimov and F Bociort and JJM Braat",

year = "2003",

language = "Undefined/Unknown",

volume = "5249",

pages = "624--635",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Design of lithographic objectives including the effect of spatially induced birefringence

AU - Serebriakov, A

AU - Maksimov, E.

AU - Bociort, F

AU - Braat, JJM

PY - 2003

Y1 - 2003

KW - Peer-lijst tijdschrift

M3 - Conference article

SN - 0277-786X

VL - 5249

SP - 624

EP - 635

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -