Design of low-cost resonant mode sensors

R Kazinczi; PB Turmezei; JR Mollinger; A Bossche

Design of low-cost resonant mode sensors

R Kazinczi, PB Turmezei, JR Mollinger, A Bossche

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Design, characterzation, and packaging of MEMS and microelectronics II: proceedings
Editors	PD Franzon
Place of Publication	Bellingham
Publisher	SPIE
Pages	54-61
Number of pages	8
ISBN (Print)	0-8194-4323-9
Publication status	Published - 2002
Event	Design, characterzation, and packaging of MEMS and microelectronics II, Adelaide - Bellingham Duration: 17 Dec 2002 → 19 Dec 2002

Publication series

Name
Publisher	SPIE-The International Society for Optical Engineering

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	4593
ISSN (Print)	0277-786X

Conference

Conference	Design, characterzation, and packaging of MEMS and microelectronics II, Adelaide
Period	17/12/02 → 19/12/02

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{0c6163a25f594170ac32ee7b886c0341,

title = "Design of low-cost resonant mode sensors",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "R Kazinczi and PB Turmezei and JR Mollinger and A Bossche",

year = "2002",

language = "Undefined/Unknown",

isbn = "0-8194-4323-9",

publisher = "SPIE",

pages = "54--61",

editor = "PD Franzon",

booktitle = "Design, characterzation, and packaging of MEMS and microelectronics II: proceedings",

address = "United States",

note = "Design, characterzation, and packaging of MEMS and microelectronics II, Adelaide ; Conference date: 17-12-2002 Through 19-12-2002",

}

Kazinczi, R, Turmezei, PB, Mollinger, JR & Bossche, A 2002, Design of low-cost resonant mode sensors. in PD Franzon (ed.), Design, characterzation, and packaging of MEMS and microelectronics II: proceedings. Proceedings of SPIE- International Society for Optical Engineering, vol. 4593, SPIE, Bellingham, pp. 54-61, Design, characterzation, and packaging of MEMS and microelectronics II, Adelaide, 17/12/02.

Design of low-cost resonant mode sensors. / Kazinczi, R; Turmezei, PB; Mollinger, JR et al.
Design, characterzation, and packaging of MEMS and microelectronics II: proceedings. ed. / PD Franzon. Bellingham: SPIE, 2002. p. 54-61 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 4593).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Design of low-cost resonant mode sensors

AU - Kazinczi, R

AU - Turmezei, PB

AU - Mollinger, JR

AU - Bossche, A

PY - 2002

Y1 - 2002

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-8194-4323-9

SP - 54

EP - 61

BT - Design, characterzation, and packaging of MEMS and microelectronics II: proceedings

A2 - Franzon, PD

PB - SPIE

CY - Bellingham

T2 - Design, characterzation, and packaging of MEMS and microelectronics II, Adelaide

Y2 - 17 December 2002 through 19 December 2002

ER -