Design of low-cost resonant mode sensors

R Kazinczi, PB Turmezei, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE Vol. 4593
Editors PD Franzon
Place of PublicationBellingham
PublisherSPIE
Pages54-61
Number of pages8
ISBN (Print)0-8194-4323-9
Publication statusPublished - 2001
EventDesign, Characterization, and Packaging for MEMS and Microelectronics II, Adelaide - Bellingham
Duration: 17 Dec 200119 Dec 2001

Publication series

Name
PublisherSPIE Press

Conference

ConferenceDesign, Characterization, and Packaging for MEMS and Microelectronics II, Adelaide
Period17/12/0119/12/01

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this