@inproceedings{320a41f1d1f34190bde7f9132cad6185,
title = "Design of low-cost resonant mode sensors",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "R Kazinczi and PB Turmezei and JR Mollinger and A Bossche",
year = "2001",
language = "Undefined/Unknown",
isbn = "0-8194-4323-9",
publisher = "SPIE",
pages = "54--61",
editor = "{PD Franzon}",
booktitle = "Proceedings of SPIE Vol. 4593",
address = "United States",
note = "Design, Characterization, and Packaging for MEMS and Microelectronics II, Adelaide ; Conference date: 17-12-2001 Through 19-12-2001",
}