Design of mulitlayer extreme-ultraviolet mirrors for enhanced reflectivity.

M Singh, JJM Braat

Research output: Contribution to journalArticleScientificpeer-review

56 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2189-2197
Number of pages9
JournalApplied Optics
Volume39
Issue number13
Publication statusPublished - 2000

Bibliographical note

ISBN: 0003-6935/00/132189-09

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this