Design of mulitlayer extreme-ultraviolet mirrors for enhanced reflectivity.

M Singh, JJM Braat

Research output: Contribution to journalArticleScientificpeer-review

54 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2189-2197
Number of pages9
JournalApplied Optics
Volume39
Issue number13
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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