Designing a 100 [aF/nm] capacitive transducer

L.M. Middelburg, B. El Mansouri, R.H. Poelma, H.W. Van Zeijl, J. Wei, G.Q. Zhang, W.D. Van Driel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

33 Downloads (Pure)

Abstract

The mechanical part of inertial sensors can be designed to have a large mechanical sensitivity, but also requires the transduction mechanism which translates this displacement. The overall system resolution in mechanical inertial sensors is dictated by the noise contribution of each stage and the magnitude of each sensitivity, see also Figure 1. Maximizing the capacitive sensitivity, results in suppression of noise in the electronics domain. This work focuses on the design and realization of a mechanical to electrical transduction using a capacitive readout scheme. Design considerations and measures are taken to maximize the latter are considered and illustrated using FEM simulations. A capacitive transducer showing a sensitivity of 100 [aF/nm] was designed and realized, by exploiting the large displacement behavior of the inertial sensor which was considered.

Original languageEnglish
Title of host publication2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages1-3
Number of pages3
ISBN (Electronic)978-1-5386-2359-6
DOIs
Publication statusPublished - 2018
EventEuroSimE 2018: 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Toulouse, France
Duration: 15 Apr 201818 Apr 2018

Conference

ConferenceEuroSimE 2018
Abbreviated titleEuroSimE 2018
Country/TerritoryFrance
CityToulouse
Period15/04/1818/04/18

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

  • Sensitivity
  • Fingers
  • Electrodes
  • Substrates
  • Mechanical sensors
  • Mathematical model

Fingerprint

Dive into the research topics of 'Designing a 100 [aF/nm] capacitive transducer'. Together they form a unique fingerprint.

Cite this