Detailed modeling of chemistry and transport phenomena in CVD reactors

KJ Kuijlaars

    Research output: Thesis › Dissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • van den Akker, H.E.A., Supervisor
    Award date1 Jan 1800
    Publication statusPublished - 1996

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