Determination of line edge roughness in low-dose top-down scanning electron microscopy images

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	English
Pages (from-to)	1-3
Number of pages	3
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	9050
Publication status	Published - 2014

Cite this

@article{0946236b3db24812a53696a8f4b56518,

title = "Determination of line edge roughness in low-dose top-down scanning electron microscopy images",

author = "T Verduin and P Kruit and CW Hagen",

year = "2014",

language = "English",

volume = "9050",

pages = "1--3",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Determination of line edge roughness in low-dose top-down scanning electron microscopy images

AU - Verduin, T

AU - Kruit, P

AU - Hagen, CW

PY - 2014

Y1 - 2014

M3 - Conference article

SN - 0277-786X

VL - 9050

SP - 1

EP - 3

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -